Last edited by Zuktilar
Saturday, July 25, 2020 | History

3 edition of Micro-optics and lithography found in the catalog.

Micro-optics and lithography

Maria Kufner

Micro-optics and lithography

by Maria Kufner

  • 8 Want to read
  • 32 Currently reading

Published by VUBPress in Brussels, Belgium .
Written in English

    Subjects:
  • Integrated optics.,
  • Optical interconnects.,
  • Microlithography.,
  • Integrated circuits -- Masks.

  • Edition Notes

    Includes bibliographical references and index.

    StatementMaria Kufner and Stefan Kufner.
    ContributionsKufner, Stefan.
    Classifications
    LC ClassificationsTA1660 .K84 1997
    The Physical Object
    Pagination206 p. :
    Number of Pages206
    ID Numbers
    Open LibraryOL291168M
    ISBN 109054871679
    LC Control Number97195775
    OCLC/WorldCa37349228

    Particular emphasis is put on the design and use of halftone transmission masks for the lithography step required in the fabrication process of mechanical, optical or electronic components. The combination of Nanoscribe’s advanced processes, software recipes with optimized print parameters, and tailor-made 2PP resins is a key advantage for the direct fabrication of high-precision micro-optics, overcoming geometrical constraints known from standard fabrication methods and achieving high shape accuracy and optical smooth surfaces.

      Microoptics and nanooptics fabrication. Ed. by Shanalyn A. Kemme. CRC Press pages $ Hardcover TA Electrical and computer engineers from the University of Delaware-Newark, the Sandia National Laboratories in New Mexico, and other commercial and academic laboratories explain some of the techniques being used or proposed to keep the .   Ottevaere H et al Refractive microlens arrays made by deep proton lithography: technology and characterization Proc. 7th Micro Optics Conf., MOC '99 (Makuhari, ) pp Google Scholar [19].

    The paper describes the status and future trends of shadow printing lithography in mask aligners and the decisive role of micro-optics as key enabling technology. Read more Article. This text examines the technology behind the plethora of modern industrial and domestic technologies which incorporate micro-optics eg. CDs, cameras, automated manufacturing systems, mobile communications etc. It includes a simple but comprehensive introduction to micro-optical developments design, and an overview of fabrication and replication technology. The theoretical, practical and.


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Micro-optics and lithography by Maria Kufner Download PDF EPUB FB2

This book is a thorough review of current techniques for the fabrication of micro-optical elements. It gives an overview of diffractive and refractive micro-optics and includes also guided wave micro-optics.

Special attention is given to new techniques including deep etch lithography, like excimer lasers, LIGA and high energy ion by:   Soft lithography can tolerate a wide selection of materials, can be used for non-planar and three-dimensional structure fabrication, and most importantly can reproduce high-resolution nano/microstructures at very low cost.

As a result, soft lithography has generated considerable research interest over the past by: 4. Sections are included on the simulation and optimization of design for micro-optics and subsequently the efficient transformation from design to real optical elements, using techniques such as e-beam writing, laser beam writing, lithography, etching and thin film deposition.

Basic aspects of deep lithography with particles for the fabrication of micro-optical and micromechanical structures Author(s): Bart Volckaerts; Pedro Vynck; Michael Vervaeke; Luigi Cosentino; Paolo Finocchiaro; Patrick Reichart; Gerd Datzmann; Andreas Hauptner; Gunther Dollinger; Alex.

This book, written by Google engineer Bernard Kress, reviews the broad range of micro-optics used today in industry and research (refractives, GRIN, hybrid, diffractives, holographic, nano-optics).

It provides quick access to optimal design and modeling techniques, both analytic and numeric. Micro-optics plays a key role in improving the performance of shadow printing lithography in mask aligners.

Refractive or diffractive micro-optics allows us to efficiently collect the light from the light source and to precisely shape the illumination light (customized illumination). Table of Contents. Fabricating Surface-Relief Diffractive Optical Elements, S.A.

Kemme and A.A. Cruz-Cabrera. Fabrication of Microoptics with Plasma Etching Techniques, G.T. Borek. Analog Lithography with Phase-Grating Masks, J.W. Sung and E.G. Johnson. Electron Beam Lithography for the Nanofabrication of Optical Devices, A.

Gin and J.R. Wendt. Nanoimprint Lithography and Device. Micro-optics is a key enabling technol-ogy for photolithography. The invention of modern “planar” micro-optics Interestingly, modern micro-optics was much related to semiconductor industry and its wafer-based “planar” technology from the very beginning.

Dennis Ga-bor’s invention of holography in allowed to record complex optical. The fundamental limit of optical lithography is not determined by the optical system alone but rather is an overall contributions from the optics, resist, develop and etching processes. Process window: Capability of printing small features does not always guarantee a good quality and a repeatable and controllable patterning.

Alignment. Technical Paper. Printing sub-micron structures using Talbot mask-aligner lithography with a nm CW laser light source (pdf - kb)Micro-Optics for Photolithography - Key enabling technology for wafer-based manufacturing technology - (view online)Micro-Optics: Enabling Technology for Illumination Shaping in Optical Lithography - (pdf - kb).

"This book is a thorough review of current techniques for the fabrication of micro-optical elements. It gives an overview of diffractive and refractive micro-optics and includes also guided wave micro-optics. Special attention is given to new techniques including deep etch lithography, like excimer lasers, LIGA and high energy ion irradiation.".

Ryan T. Hill, Ashutosh Chilkoti, in Biomaterials Science (Third Edition), Multiphoton Lithography. Multiphoton lithography (MPL) is a laser-based, direct-write approach to three-dimensional patterning in which multiphoton excitation of photoinitiators or photosensitizers is used to photocross-link or photopolymerize materials at the focus of a high instantaneous-energy, pulsed laser beam.

Back to book. chapter 5. 52 Pages. Micro-Optics for Illumination Light Shaping in Photolithography. With Reinhard Voelkel. Photolithography allows very complex micro- and nanostructures to be built by copying a pattern from a photomask to a wafer. For both shadow printing and projection lithography systems, the shaping of the illumination light.

Multiphoton Lithography. Direct laser writing offers high spatial resolution, which enables patterning of true 3D micro- and nanostructures with lateral feature sizes below the diffraction limit [63,64] and an excellent fabrication compatibility with conventional planar circuits as well as high writing speed.

Grayscale lithography is used to produce three-dimensional (3D) structures on micro- and nanoscale. During the last decade, micro-optics and other applications were actively pushing the market demand for such structures.

Methods of design and fabrication of high-power diode lasers using proven semiconductor technologies are described in this book.

The latter include epitaxy and optical lithography, mounting on heat sinks, beam forming with micro-optics and coupling to optical fibers, and reliability testing.

Direct applications of high-power diode lasers in materials processing and for pumping hitherto unknown. Now, extreme UV lithography (EUV), nm immersion lithography, mask less lithography (MLL) techniques and nanoimprint lithography (NIL) are considered as candidates for the so called Next Generation Lithography (NGL) at 32 nm and 22 nm nodes.

In parallel, imprint technology has been promoted by a large scientific community and non-IC industry. A maskless lithography method to realize the rapid and cost-effective fabrication of micro-optics elements with arbitrary surface profiles is reported.

A digital micro-mirror device (DMD) is applied to flexibly modulate that the exposure dose according to the surface profile of the structure to be fabricated.

Due to the fact that not only the relationship between the grayscale levels of the. Sections are included on the simulation and optimization of design for micro-optics and subsequently the efficient transformation from design to real optical elements, using techniques such as e-beam writing, laser beam writing, lithography, etching and thin film deposition.

Solid immersion optical lithography: index matching and resonant reflectors for large exposure field, high-aspect ratio imaging in the ultrahigh-numerical aperture regime.

Sam Lowrey, Richard Blaikie. Micro/Nanolith. MEMS MOEMS 14(4), (21 December )https. – Roll-to-roll UV imprinting technology for thin foil polymer micro-optics Samuli Siitonen, CTO, Nanocomp (FINLAND) – Maskless and free: grey scale and step & repeat nanoimprint lithography for advanced optics Paul Hartmann, CEO, JOANNEUM RESEARCH (AUSTRIA) – Coffee break.

SESSION 4: Materials and assembly. Soft UV Imprint Lithography is a highly parallel technique for the fabrication of polymeric microlenses, the key elements of wafer level optical systems.

Through this soft UV Imprint Lithography process, lens patterns can be converted into optical polymer materials using working stamps simulated from wafer-size master stamps.

Abstract: Photolithography is the engine that empowered microelectronics and semiconductor industry for more than 50 years. Photolithography is the enabling process behind the powerful concept of "shrinkage ", also referred to as "die shrink ", the ability to reduce the minimum feature size of transistors, electronic wires and other components of a microchip from some 50 .